CALCULATION AND MEASUREMENT OF MEMS PARAMETERS WITH ELECTROMAGNETIC CONTROL
نویسندگان
چکیده
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ژورنال
عنوان ژورنال: Interexpo GEO-Siberia
سال: 2019
ISSN: 2618-981X
DOI: 10.33764/2618-981x-2019-8-292-297